코리아인스텍(주)-니콘대리점

10 Main Bodies available for different applications

For Large Stroke Stage (Max, 300mm x 200mm x 200mm)

MM-800/LM: Motorized Z Axis
MM-800/L: Built-in Z Linear Scale
MM-800: 2-Axis Measurement Model
MM-800/S: For 3rd Party DRO
MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale

For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)

MM-400/LM: Motorized Z Axis
MM-400/L: Built-in Z Linear Scale
MM-400: 2-Axis Measurement Model
MM-400/S: For 3rd Party DRO
MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale

Features

300mm x 200mm Stage

Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface

Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators

High-intensity white LED illuminator is provided as standard for brightfield use. This illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency.

Focusing Aid (FA)

Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.