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NEXIV VMZ-H3030
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NEXIV VMZ-S Series iNEXIV VMA Series NEXIV VMZ-K Series NEXIV VMZ-H3030

NEXIV VMZ-H3030

Highest precision of the NEXIV series
Achieves measurement at the highest precision of the NEXIV series, as well as advanced usability and performance. VMZ-H3030 incorporates the features of the up-to-date technologies of the Nikon VMZ-R series to achieve high accuracy and throughput with excellent ease of use. Suitable for applications requiring strict quality control through highly precise measurement.
NEXIV model with the highest precision
Achieves measurement at the highest precision of the NEXIV series, as well as advanced usability and performance. VMZ-H3030 incorporates the features of the up-to-date technologies of the Nikon VMZ-R series to achieve high accuracy and throughput with excellent ease of use. Suitable for applications requiring strict quality control through highly precise measurement.
Specifications
Strokes (X,Y,Z) 300 x 300 x 150 mm
Minimum readout 0.01 μm
Maximum sample weight 30 kg (Accuracy guaranteed: 10 kg)
Maximum permissible error
(for samples under 20 kg)		 EUX,MPE, EUY,MPE: 0.6 + 2L / 1000 μm
EUXY,MPE: 0.9+3L / 1000 μm
EUZ,MPE: 0.9+L / 150 μm
Accuracy guaranteed temperature 20°C ± 0.5 K
Maximum driving speed XY, Z 100 mm/s, 50 mm/s
Minimum driving speed XY, Z 0.01 mm/s, 0.001 mm/s
Camera 1/3“ Black and White CCD, 1/3“ Color CCD
  • *Color camera option is available only with Type 1, 2 and 3
Working distance Type 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) / Type 4: 30 mm
Type TZ: 31 mm (low magnification), 11 mm (high magnification)
Magnification and FOV Type 1: 0.5-7.5x/9.33 x 7.01-0.622 x 0.467 mm
Type 2: 1-15x/4.67 x 3.5-0.311 x 0.233 mm
Type 3: 2-30x/2.33 x 1.75-0.155 x 0.117 mm
Type 4: 4-60x / 1.165 x 0.875-0.078 x 0.058 mm
Type TZ: 1-120x/4.67 x 3.5-0.039 x 0.029 mm
Autofocus Vision AF, Laser AF
Illumination Type 1, 2, 3, and 4 Episcopic, diascopic, and 8-segment ring with 3 angles
*All white LED/Type 4 has only 1 angle
Type TZ: Episcopic, diascopic, darkfield
Power source AC 100 - 240 V ± 10% 50/60 Hz
Power consumption 5 A - 2.5 A
Dimensions (W x D x H) & weight Main body with table: 1000 x 1125 x 1750 mm / approx. 500 kg
Controller: 190 x 450 x 440 mm / approx. 15 kg
Footprint (W x D) 3000×2800 mm
Dimensions
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